SEMI M42 : 2016
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR COMPOUND SEMICONDUCTOR EPITAXIAL WAFERS
Published date
12-01-2013
Contains the requirements for epitaxial layers of the generic composition A[a]B[b]C[c]...N[n] grown on monocrystalline wafers of GaAs or InP (other substrates may be considered where appropriate documents exist to describe the specification of the substrate).
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.