SEMI M69 : 2007
Current
Current
The latest, up-to-date edition.
PRACTICE FOR DETERMINING WAFER NEAR-EDGE GEOMETRY USING ROLL-OFF AMOUNT, ROA
Published date
12-01-2013
Describes selection of the point at which the ROA is determined and the reference line to be utilized for this determination.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.