SEMI M69 : 2007
Current
Current
The latest, up-to-date edition.
PRACTICE FOR DETERMINING WAFER NEAR-EDGE GEOMETRY USING ROLL-OFF AMOUNT, ROA
Published date
12-01-2013
Describes selection of the point at which the ROA is determined and the reference line to be utilized for this determination.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
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