SEMI M8:2012(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Polished Monocrystalline Silicon Test Wafers
Hardcopy
16-11-2023
English
01-07-2018
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI M1 : 2017 | SPECIFICATION FOR POLISHED SINGLE CRYSTAL SILICON WAFERS |
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