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SEMI M8:2012(R2023)
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The latest, up-to-date edition.
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Specification for Polished Monocrystalline Silicon Test Wafers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics.
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