SEMI M8:2012(R2023)
Current
Current
The latest, up-to-date edition.
Specification for Polished Monocrystalline Silicon Test Wafers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
€141.67
Excluding VAT
This Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI M1 : 2017 | SPECIFICATION FOR POLISHED SINGLE CRYSTAL SILICON WAFERS |
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