SEMI ME1392 : 2016
Current
Current
The latest, up-to-date edition.
GUIDE FOR ANGLE RESOLVED OPTICAL SCATTER MEASUREMENTS ON SPECULAR OR DIFFUSE SURFACES
Published date
12-01-2013
Sorry this product is not available in your region.
Gives a procedure for the determination of the amount and angular distribution of optical scatter from an opaque surface.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI PV15 : 2011(R2015) | GUIDE FOR DEFINING CONDITIONS FOR ANGLE RESOLVED LIGHT SCATTER MEASUREMENTS TO MONITOR THE SURFACE ROUGHNESS AND TEXTURE OF PV MATERIALS |
| SEMI MF1811 : JAN 2016 | GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA |
| ASTM E 2387 : 2005 : R2011 | Standard Practice for Goniometric Optical Scatter Measurements |
| ASTM E 2387 : 2 | PRACTICE FOR GONIOMETRIC OPTICAL SCATTER MEASUREMENTS |
| ASTM E 2387 : 2005 | Standard Practice for Goniometric Optical Scatter Measurements |
| SEMI M58 : 2009(R2014) | TEST METHOD FOR EVALUATING DMA BASED PARTICLE DEPOSITION SYSTEMS AND PROCESSES |
| SEMI MF1048 : 2017 | TEST METHOD FOR MEASURING THE REFLECTIVE TOTAL INTEGRATED SCATTER |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
| SEMI MF1811 : JAN 2016 | GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.