Name: SEMI ME1392 : 2016
Brand: SEMI

GUIDE FOR ANGLE RESOLVED OPTICAL SCATTER MEASUREMENTS ON SPECULAR OR DIFFUSE SURFACES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a procedure for the determination of the amount and angular distribution of optical scatter from an opaque surface.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2003)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI ME1392 : 2016