SEMI MF1392:2007(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe
Hardcopy
17-11-2023
English
01-01-2018
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Test Method covers the measurement of net carrier density and net carrier density profiles in epitaxial and polished bulk silicon wafers in the range from about 4 × 1013 carriers/cm3 to about 8 × 1016 carriers/cm3 (resistivity range from about 0.1 Ω·cm to about 100 Ω·cm in n-type wafers and from about 0.24 Ω·cm to about 330 Ω·cm in p-type wafers).
| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
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