SEMI MF1527:2012(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
Available format(s)
Hardcopy
Superseded date
17-11-2023
Language(s)
English
Published date
01-01-2018
This Guide covers the application of certified reference materials (CRMs) for resistivity measurements on silicon wafers.
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