SEMI MF1708 : 2004
Current
Current
The latest, up-to-date edition.
PRACTICE FOR EVALUATION OF GRANULAR POLYSILICON BY MELTER-ZONER SPECTROSCOPIES
Published date
12-01-2013
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Specifies a procedure to consolidate granular polysilicon into a solid rod and then to convert the polysilicon rod into a single crystal by a float-zone technique.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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| SEMI M16 : 2010(R2015) | SPECIFICATION FOR POLYCRYSTALLINE SILICON |
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| SEMI MF1630 : 2007(R2012) | TEST METHOD FOR LOW TEMPERATURE FT-IR ANALYSIS OF SINGLE CRYSTAL SILICON FOR 3-5 IMPURITIES |
| SEMI C31 : 2015 | SPECIFICATION FOR METHANOL |
| SEMI C34 : 2013(R 2019) | SPECIFICATION AND GUIDELINE FOR MIXED ACID ETCHANTS |
| SEMI C28 : 2011 | SPECIFICATIONS FOR HYDROFLUORIC ACID |
| SEMI MF1241 : 95(R2000) | TERMINOLOGY OF SILICON TECHNOLOGY |
| SEMI C3.42 : 1990 | PROVISIONAL STANDARD FOR ARGON (AR), VLSI GRADE, BULK |
| SEMI MF1389 : 2015 | TEST METHOD FOR PHOTOLUMINESCENCE ANALYSIS OF SINGLE CRYSTAL SILICON FOR 3-5 IMPURITIES |
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