SEMI MF1708 : 2004
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The latest, up-to-date edition.
PRACTICE FOR EVALUATION OF GRANULAR POLYSILICON BY MELTER-ZONER SPECTROSCOPIES
Published date
12-01-2013
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Specifies a procedure to consolidate granular polysilicon into a solid rod and then to convert the polysilicon rod into a single crystal by a float-zone technique.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI MF1241 : 95(R2000) | TERMINOLOGY OF SILICON TECHNOLOGY |
| SEMI C3.42 : 1990 | PROVISIONAL STANDARD FOR ARGON (AR), VLSI GRADE, BULK |
| SEMI MF1389 : 2015 | TEST METHOD FOR PHOTOLUMINESCENCE ANALYSIS OF SINGLE CRYSTAL SILICON FOR 3-5 IMPURITIES |
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