SEMI MF1708 : 2004
Current
Current
The latest, up-to-date edition.
PRACTICE FOR EVALUATION OF GRANULAR POLYSILICON BY MELTER-ZONER SPECTROSCOPIES
Published date
12-01-2013
Specifies a procedure to consolidate granular polysilicon into a solid rod and then to convert the polysilicon rod into a single crystal by a float-zone technique.
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