SEMI MF1723 : 2004
Current
Current
The latest, up-to-date edition.
PRACTICE FOR EVALUATION OF POLYCRYSTALLINE SILICON RODS BY FLOAT-ZONE CRYSTAL GROWTH AND SPECTROSCOPY
Published date
12-01-2013
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Specifies the sampling system and float-zone crystal growth procedures used to prepare polysilicon core samples for analysis of acceptor, donor, and carbon content.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
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