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SEMI MF1724 : 2004

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR MEASURING SURFACE METAL CONTAMINATION OF POLYCRYSTALLINE SILICON BY ACID EXTRACTION-ATOMIC ABSORPTION SPECTROSCOPY

Published date

12-01-2013

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Describes the quantitative determination of surface trace metal contamination on the surface of polycrystalline silicon chunks using an acid to extract the metals from the surface.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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