SEMI MF1724 : 2004
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TEST METHOD FOR MEASURING SURFACE METAL CONTAMINATION OF POLYCRYSTALLINE SILICON BY ACID EXTRACTION-ATOMIC ABSORPTION SPECTROSCOPY
Published date
12-01-2013
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Describes the quantitative determination of surface trace metal contamination on the surface of polycrystalline silicon chunks using an acid to extract the metals from the surface.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
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SEMI PV1 : 2011(R2018) | TEST METHOD FOR MEASURING TRACE ELEMENTS IN SILICON FEEDSTOCK FOR SILICON SOLAR CELLS BY HIGH-MASS RESOLUTION GLOW DISCHARGE MASS SPECTROMETRY |
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SEMI M16 : 2010(R2015) | SPECIFICATION FOR POLYCRYSTALLINE SILICON |
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