SEMI MF1811 : JAN 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA
Superseded date
11-12-2021
Published date
12-01-2013
Specifies the methodology for calculating a set of commonly used statistical parameters and functions of surface roughness from a set of measured surface profile data.
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