SEMI MF1811 : JAN 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA
Superseded date
11-12-2021
Superseded by
Published date
12-01-2013
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Specifies the methodology for calculating a set of commonly used statistical parameters and functions of surface roughness from a set of measured surface profile data.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI PV15 : 2011(R2015) | GUIDE FOR DEFINING CONDITIONS FOR ANGLE RESOLVED LIGHT SCATTER MEASUREMENTS TO MONITOR THE SURFACE ROUGHNESS AND TEXTURE OF PV MATERIALS |
| SEMI ME1392 : 2016 | GUIDE FOR ANGLE RESOLVED OPTICAL SCATTER MEASUREMENTS ON SPECULAR OR DIFFUSE SURFACES |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI M58 : 2009(R2014) | TEST METHOD FOR EVALUATING DMA BASED PARTICLE DEPOSITION SYSTEMS AND PROCESSES |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI ME1392 : 2016 | GUIDE FOR ANGLE RESOLVED OPTICAL SCATTER MEASUREMENTS ON SPECULAR OR DIFFUSE SURFACES |
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