SEMI MF1982 : 2017
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR ANALYZING ORGANIC CONTAMINANTS ON SILICON WAFER SURFACES BY THERMAL DESORPTION GAS CHROMATOGRAPHY
Published date
12-01-2013
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Contains the identification and quantification of organic compounds on wafer surfaces by using gas chromatography mass spectrometry (GC-MS).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
|
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI M1 : 2017 | SPECIFICATION FOR POLISHED SINGLE CRYSTAL SILICON WAFERS |
| SEMI PV22 : 2017 | SPECIFICATION FOR SILICON WAFERS FOR USE IN PHOTOVOLTAIC SOLAR CELLS |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
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