SEMI MF576:2012(R2023)
Current
Current
The latest, up-to-date edition.
Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Test Method covers the measurement by ellipsometry of the thickness and refractive index of an insulator grown or deposited on a silicon substrate.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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