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SEMI MF576 -2012:(R2018)

SEMI MF576 -2012:(R2018)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

TEST METHOD FOR MEASUREMENT OF INSULATOR THICKNESS AND REFRACTIVE INDEX ON SILICON SUBSTRATES BY ELLIPSOMETRY

Superseded date

16-11-2023

Published date

04-08-2018

Publisher

Semiconductor Equipment & Materials Institute

Details about Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Revision
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI M41 : 2015 SPECIFICATION OF SILICON-ON-INSULATOR (SOI) FOR POWER DEVICE/ICS
SEMI MF1153 : 2010(R2015) TEST METHOD FOR CHARACTERIZATION OF METAL-OXIDE SILICON (MOS) STRUCTURES BY CAPACITANCE-VOLTAGE MEASUREMENTS
SEMI MF1618 : 2010(R2015) PRACTICE FOR DETERMINATION OF UNIFORMITY OF THIN FILMS ON SILICON WAFERS
SEMI E141 : 2005 GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY

SEMI C31 : 2015 SPECIFICATION FOR METHANOL
SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY
SEMI C19 : 2014 SPECIFICATION FOR ACETONE

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