SEMI MF576:2012(R2023)
Current
Current
The latest, up-to-date edition.
Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Test Method covers the measurement by ellipsometry of the thickness and refractive index of an insulator grown or deposited on a silicon substrate.
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