SEMI MF672:2012(R2023)
Current
Current
The latest, up-to-date edition.
Guide for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Guide covers procedures for measurement of the resistivity profile perpendicular to the surface of a silicon wafer of known orientation and type in any resistivity range for which there exist suitable standards.
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