SEMI MF673:2017(R2022)
Current
Current
The latest, up-to-date edition.
Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gauge
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2022
€125.00
Excluding VAT
Resistivity is a primary quantity for characterization and specification of material used for semiconductor electronic devices.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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