SEMI MF673:2017(R2022)
Current
Current
The latest, up-to-date edition.
Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gauge
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2022
Resistivity is a primary quantity for characterization and specification of material used for semiconductor electronic devices.
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