SEMI MF95 : 2007(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR THICKNESS OF LIGHTLY DOPED SILICON EPITAXIAL LAYERS ON HEAVILY DOPED SILICON SUBSTRATES USING AN INFRARED DISPERSIVE SPECTROPHOTOMETER
Available format(s)
Hardcopy
Superseded date
04-11-2023
Language(s)
English
Published date
08-11-2018
Gives a technique for the measurement of the thickness of epitaxial layers of silicon deposited on silicon substrates.
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