SEMI M11 : 2004
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATIONS FOR SILICON EPITAXIAL WAFERS FOR INTEGRATED CIRCUIT (IC) APPLICATIONS
01-11-2005
12-01-2013
Describes and provides examples of silicon epitaxial wafer requirements for integrated circuit device manufacture. It is restricted to wafers of diameter 100 mm or greater with epitaxial layer thickness less than or equal to 25 m.
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