SEMI MS1 : 2007(R2018)
Current
Current
The latest, up-to-date edition.
GUIDE TO SPECIFYING WAFER-WAFER BONDING ALIGNMENT TARGETS
Published date
12-01-2013
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Gives a framework for specifying the dimensions, location, quantity and characteristics of alignment targets that are placed on each wafer of a pair of wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
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