SEMI MS6 : 2008
Current
Current
The latest, up-to-date edition.
GUIDE FOR DESIGN AND MATERIALS FOR INTERFACING MICROFLUIDIC SYSTEMS
Published date
12-01-2013
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Provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (03/2008) Supersedes SEMI PR9. (04/2008)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| Supersedes |
| SEMI MS7 : 2008 | SPECIFICATION FOR MICROFLUIDIC INTERFACES TO ELECTRONIC DEVICE PACKAGES |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| SEMI F79 : 2014 | GUIDE FOR GAS COMPATIBILITY WITH SILICON USED IN GAS DISTRIBUTION COMPONENTS |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
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