SEMI PR9 : 2005
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
PROPOSED GUIDE FOR STANDARD PERFORMANCE, PRACTICES, AND ASSEMBLY FOR ULTRA HIGH PURITY MICROSCALE FLUIDIC SYSTEMS FOR USE IN SCALABLE PROCESS ENVIRONMENTS
01-03-2008
12-01-2013
Provides guidelines for generic fluidic I/O design and fabrication that can reduce redundant engineering effort and lead to improved design, manufacturability, testing and operation.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.