SEMI MS7 : 2008
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR MICROFLUIDIC INTERFACES TO ELECTRONIC DEVICE PACKAGES
Published date
12-01-2013
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Describes an industry-standard for fluidic interfaces with electronic devices. Also describes the connection attributes and specifies the interface dimensions required to design and build devices and systems that are compliant with this standard.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (06/2008)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI MS9 : 2011 | SPECIFICATION FOR HIGH DENSITY PERMANENT CONNECTIONS BETWEEN MICROFLUIDIC DEVICES |
| SEMI MS6 : 2008 | GUIDE FOR DESIGN AND MATERIALS FOR INTERFACING MICROFLUIDIC SYSTEMS |
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