SEMI P35 : 2006(R2013)
Current
Current
The latest, up-to-date edition.
TERMINOLOGY FOR MICROLITHOGRAPHY METROLOGY
Published date
12-01-2013
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Describes a consistent terminology for the understanding and discussion of metrology issues important to microlithography.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (11/2006)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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