SEMI P4 : 1992(R1999)
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR ROUND QUARTZ PHOTOMASK SUBSTRATES
Withdrawn date
01-07-2006
Published date
12-01-2013
Covers the general requirements of quartz round substrate for hard surface photomasks.
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