SEMI PR2 : 1998
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
PROPOSED GUIDE FOR 300 MM PROCESS TOOL POINTS OF CONNECTION TO FACILITY SERVICES
01-02-1999
12-01-2013
It is a guide for 300 mm equipment manufacturers for defining the positioning of connection (TPOC) required on semiconductor processing equipment for hookup to facility utility services. It specifies location references for the TPOC's and gives guidelines for efficient tool installation. It covers strategies for supporting the device manufacturers ability to pre-facilitize the UPOC (utility point of connection). It is applicable to 300 mm semiconductor processing equipment and supplier driven support equipment for factory installation. It addresses 3 areas that are required to support cost and duration reductions for tool installations.
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