SEMI PR9 : 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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PROPOSED GUIDE FOR STANDARD PERFORMANCE, PRACTICES, AND ASSEMBLY FOR ULTRA HIGH PURITY MICROSCALE FLUIDIC SYSTEMS FOR USE IN SCALABLE PROCESS ENVIRONMENTS
Superseded date
01-03-2008
Published date
12-01-2013
Provides guidelines for generic fluidic I/O design and fabrication that can reduce redundant engineering effort and lead to improved design, manufacturability, testing and operation.
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