SEMI PR9 : 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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PROPOSED GUIDE FOR STANDARD PERFORMANCE, PRACTICES, AND ASSEMBLY FOR ULTRA HIGH PURITY MICROSCALE FLUIDIC SYSTEMS FOR USE IN SCALABLE PROCESS ENVIRONMENTS
Superseded date
01-03-2008
Superseded by
Published date
12-01-2013
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Provides guidelines for generic fluidic I/O design and fabrication that can reduce redundant engineering effort and lead to improved design, manufacturability, testing and operation.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
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