SEMI PV1 : 2011(R2018)
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TEST METHOD FOR MEASURING TRACE ELEMENTS IN SILICON FEEDSTOCK FOR SILICON SOLAR CELLS BY HIGH-MASS RESOLUTION GLOW DISCHARGE MASS SPECTROMETRY
Published date
12-01-2013
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Intended to be used to monitor the bulk trace level elemental impurities in silicon feedstock that affect the performance of the silicon solar cell, in particular, the concentration of intentionally added dopants, and unintentionally added dopants.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2009)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
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