• SEMI S23 : 2016

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT

    Available format(s): 

    Superseded date:  11-12-2021

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Defines concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME).

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (02/2005)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Superseded
    Superseded By

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI S29 : 2012 GUIDE FOR FLUORINATED GREENHOUSE GAS (F-GHG) EMISSION CHARACTERIZATION AND REDUCTION
    SEMI E175 : 2016 SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC)
    SEMI E167 : 2013 SPECIFICATION FOR EQUIPMENT ENERGY SAVING MODE COMMUNICATIONS (EESM)
    SEMI E149 : 2014 GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT
    SEMI E35 : 2012 GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI S7 : 2015 SAFETY GUIDELINE FOR EVALUATION PERSONNEL AND EVALUATING COMPANY QUALIFICATIONS

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E10 : 2014E SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI E6 : 2014 GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION
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