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SEMI E167 : 2013

SEMI E167 : 2013

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR EQUIPMENT ENERGY SAVING MODE COMMUNICATIONS (EESM)

Published date

14-01-2014

Publisher

Semiconductor Equipment & Materials Institute

Describes message services and behavior between the host and production equipment to facilitate a reduced rate of energy consumption in the production equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E167.1. (12/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E175 : 2016 SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC)

SEMI S23 : 2016 GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT

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