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SEMI E175 : 2016

SEMI E175 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC)

Published date

06-12-2016

Publisher

Semiconductor Equipment & Materials Institute

Specifies communication between production equipment and the subsystem to enable energy saving mode (reduced energy consumption rate) operation by using sleep level transitions.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2016)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI S23 : 2016 GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E167 : 2013 SPECIFICATION FOR EQUIPMENT ENERGY SAVING MODE COMMUNICATIONS (EESM)

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