SEMI S6 : 2007E
Current
Current
The latest, up-to-date edition.
EHS GUIDELINE FOR EXHAUST VENTILATION OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
12-01-2013
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Provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003) Also available in CD-ROM. (06/2007) E = This standard was editorially modified to correct an error. (12/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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