SEMI T1 : 1995(R2003)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR BACK SURFACE BAR CODE MARKING OF SILICON WAFERS
01-07-2009
12-01-2013
Describes the content and location of a back surface bar code marking for silicon wafers. Also allows the performance requirements of related bar code-reading equipment to be simplified. In addition, provision is made for an optional alphanumeric marking of the size specified in SEMI M12 to enable operator identification of wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI T14 : 2005 | SPECIFICATION FOR MICRO ID ON 300 MM SILICON WAFERS |
| SEMI T2 : 1998(R2004) | SPECIFICATION FOR MARKING OF WAFERS WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL |
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