SEMI T12.1 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS
Published date
12-01-2013
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Maps Services and data in Specification of Tracking Jig and Implements into SECS protocol. Also applies to SECS implementation of Jigs and Implements traceability with some interoperability with semiconductor Manufacturing Execution System (MES).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005) Not available separately, Published within the SEMI T12 family of standards. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI T12 : 2010 | SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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