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SEMI T12 : 2010

SEMI T12 : 2010

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Lays down concept to trace Jigs and/or Implements used on equipment for processing material and make sure required information, communications and services to realize the concept.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Includes SEMI T12.1 & SEMI T12.2. (02/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI T13.1 : 2004(R2010) SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING
SEMI T18 : 2006(R2018) SPECIFICATION OF PARTS AND COMPONENTS TRACEABILITY
SEMI T12.1 : 2004(R2010) SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS
SEMI T12.2 : 2005 SPECIFICATION FOR XML PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS

SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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