SEMI T13.1 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING
Published date
12-01-2013
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Describes services and data in SEMI T13 into SECS protocol. This document is applied to SECS implementation of semiconductor device traceability with some interoperability with semiconductor Manufacturing Execution System (MES).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI T13 family of standards. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI G84 : 2003 | SPECIFICATION FOR STRIP MAP PROTOCOL |
| SEMI T12 : 2010 | SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI T13 : 2004(R2010) | SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES |
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