Name: SEMI T13.1 : 2004(R2010)
Brand: SEMI

SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes services and data in SEMI T13 into SECS protocol. This document is applied to SECS implementation of semiconductor device traceability with some interoperability with semiconductor Manufacturing Execution System (MES).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI T13 family of standards. (07/2010)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI G84 : 2003	SPECIFICATION FOR STRIP MAP PROTOCOL
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SEMI E39 : 2003(R2014)	OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI T13 : 2004(R2010)	SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES

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SEMI T13.1 : 2004(R2010)

SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING

Abstract

General Product Information

Standards Referencing This Book

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