SEMI T13.2 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR XML PROTOCOL FOR DEVICE TRACKING
Published date
12-01-2013
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Describes services and data in SEMI T13 into XML protocol. This document is applied to XML implementation of Jigs and Implements traceability with some interoperability with Surface Mount Technology (SMT) equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI T13 family of standards. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI T12 : 2010 | SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS |
| SEMI T13 : 2004(R2010) | SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES |
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