Name: SEMI T13.2 : 2004(R2010)
Brand: SEMI

SPECIFICATION FOR XML PROTOCOL FOR DEVICE TRACKING

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes services and data in SEMI T13 into XML protocol. This document is applied to XML implementation of Jigs and Implements traceability with some interoperability with Surface Mount Technology (SMT) equipment.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI T13 family of standards. (07/2010)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI T12 : 2010	SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS
SEMI T13 : 2004(R2010)	SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES

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SEMI T13.2 : 2004(R2010)

SPECIFICATION FOR XML PROTOCOL FOR DEVICE TRACKING

Abstract

General Product Information

Standards Referencing This Book

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