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SEMI T14.1 : 2005
Current
Current
The latest, up-to-date edition.
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SPECIFICATION FOR THE MICRO ID OF SHORT VERTICAL DIMENSION ON 300 MM WAFER
Published date
12-01-2013
Describes a new means of identification with the Micro ID on 300 mm polished monocrystalline Silicon wafer with polished edge for process control.
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