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SEMI T6 : 1997(R2004)

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

PROCEDURE AND FORMAT FOR REPORTING OF TEST RESULTS BY ELECTRONIC DATA INTERCHANGE (EDI)

Withdrawn date

01-11-2010

Published date

12-01-2013

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Describes a procedure and format using ANSI ASC X12 '863 Report of Test Results' for electronic data interchange (EDI).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. E = Editorially modified to correct an error. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI M18 : 2012 GUIDE FOR DEVELOPING SPECIFICATION FORMS FOR ORDER ENTRY OF SILICON WAFERS

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