SN EN ISO 14644-15:2018
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The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment andmaterials by airborne chemical concentration (ISO 14644-15:2017)
Hardcopy
01-07-2018
ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).
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