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  • ISO 14644-15:2017

    Current The latest, up-to-date edition.

    Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

    Available format(s):  Hardcopy, PDF, PDF 3 Users, PDF 5 Users, PDF 9 Users

    Language(s):  French, English

    Published date:  26-10-2017

    Publisher:  International Organization for Standardization

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    Abstract - (Show below) - (Hide below)

    ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).

    The following are outside the scope of ISO 14644-15:2017:

    - health and safety requirements;

    - compatibility with cleaning agents and techniques;

    - cleanability;

    - biocontamination;

    - specific requirements of equipment and materials for processes and products;

    - design details of equipment.

    General Product Information - (Show below) - (Hide below)

    Development Note Supersedes ISO/DIS 14644-15. (10/2017)
    Document Type Standard
    Product Note THIS STANDARD ALSO REFERS-JIS B 9926, SEMI G67-0996 (Reapproved 0811),SEMI E137-0705 (Reapproved 1111),AIR1167, IEST-RP-CC028 THIS STANDARD ALSO REFERS-JIS B 9926,SEMI G67-0996 (Reapproved 0811),SEMI E137-0705 (Reapproved 1111),AIR1167,IEST-RP-CC028
    Publisher International Organization for Standardization
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    IEST RP CC002 : 1998 RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
    ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    ISO 14644-14:2016 Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
    ISO 2889:2010 Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
    IEST RP CC013 : 86-T EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
    ISO 16000-9:2006 Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    VDI 2083 Blatt 9.1:2006-12 Clean room technology - Compatibility with required cleanliness and surface cleanliness
    ISO 16000-6:2011 Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID
    SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
    IEST RP CC028.1 : 2002
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