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UNE-EN 62047-13:2012
Current
Current
The latest, up-to-date edition.
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Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (Endorsed by AENOR in June of 2012.)
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
01-06-2012
Publisher
Committee |
CTN 209/SC 47
|
DocumentType |
Standard
|
Pages |
18
|
PublisherName |
Asociacion Espanola de Normalizacion
|
Status |
Current
|
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