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UNE-EN 62047-6:2010

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-06-2010

Committee
CTN 209/SC 47
DocumentType
Standard
Pages
19
PublisherName
Asociacion Espanola de Normalizacion
Status
Current

Standards Relationship
EN 62047-6:2010 Identical
IEC 62047-6:2009 Identical

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€62.00
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