UNE-EN ISO 14644-1:2016

Foreword
Introduction
1 Scope
2 Definitions
3 Classification
4 Demonstration of compliance
Annexes A (informative) Graphical illustration of the classes
                        of Table 1
Annexes B (normative) Determination of particulate
                      cleanliness classification using a
                      discrete-particle-counting,
                      light-scattering instrument
Annexes C (normative) Statistical treatment of particle
                      concentration data
Annexes D (informative) Worked examples of classification
                        calculations
Annexes E (informative) Considerations for the counting and
                        sizing of particles outside the size
                        range applicable for classification
Annexes F (informative) Sequential sampling procedure
Bibliography
Figures
A.1 - Graphical representation of ISO-class concentration
      limits for selected ISO classes
F.1 - Boundaries for pass or fail by the sequential
      sampling procedure
Tables
1 - Selected airborne particulate cleanliness classes for
      cleanrooms and clean zones
C.1 - Student's t distribution for the 95% upper confidence
      limit
F.1 - Upper and lower limits for time at which C observed
      counts should arrive

This part of ISO 14644 covers the classification of air cleanliness in cleanrooms, clean zones, and separative devices exclusively in terms of concentration of airborne particles. Only particle populations having cumulative distributions based on threshold (lower limit) particle sizes ranging from 0.1 µm to 5 µm are considered for classification purposes. Air cleanliness by particle concentration, whether of a cleanroom, clean zone or separative device, will in the rest of this document be referred to by the initials ACP. The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determination of the concentration of airborne particles, equal to and greater than the specified sizes, at designated sampling locations.This part of ISO 14644 does not provide for classification of particle populations that are outside the specified lower threshold particle-size range, 0.1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0.1 µm) are addressed in ISO 14644-12:XXXX, which specifies air cleanliness by nano-scale particles, while an M descriptor (see Annex C), may be used to quantify populations of macroparticles (particles larger than 5 µm). This part of ISO 14644 cannot be used to characterise the physical, chemical, radiological or viable nature of airborne particles.