UNE-EN ISO 14644-15:2018
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
Hardcopy , PDF
Spanish, Castilian, English
19-12-2018
This standard provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644 8).Health and safety requirements are not covered by this document and may be covered by legal documents of the specific country.The following issues are excluded:¾ðcompatibility with cleaning agents and techniques;¾ðcleanability;¾ðbiocontamination;¾ðspecific requirements of equipment and materials for processes and products;¾ðdesign details of equipment.
| Committee |
CTN 100
|
| DocumentType |
Standard
|
| Pages |
32
|
| ProductNote |
THIS STANDARD ALSO REFERS TO SEMI F28-1103, SEMI E137-0705,AIR1167
|
| PublisherName |
Asociación Española de Normalización
|
| Status |
Current
|
| Standards | Relationship |
| EN ISO 14644-15:2017 | Identical |
| ISO 14644-15:2017 | Identical |
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