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UNI EN ISO 14644-10:2022

Current

Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

Published date

07-07-2022

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This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).

Committee
CT 44
DocumentType
Standard
PublisherName
Ente Nazionale Italiano di Unificazione (UNI)
Status
Current
Supersedes

Standards Relationship
ISO 14644-10:2022 Identical
EN ISO 14644-10:2022 Identical

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